■ EDA.375 Ultra High Purity (UHP) Pressure Transmitter

- Designed for Ultra High Purity (UHP) Gas Systems

- SUS316L Wetted Parts

- EP (Electropolishing), Max. Ra ≤ 0.18 μm (SEMI F19)

- Process Connection Surface Finish: Ra ≤ 0.13 μm

- Manufactured in ISO 14644 Class 5 Clean Room

- Zero & Span Adjustment Function

- Excellent External Noise Protection

- Various Process Connection Options

■ Product Overview

The EDA.375 is a high-purity pressure transmitter specifically designed for semiconductor and Ultra High Purity (UHP) gas distribution systems. All wetted parts are manufactured from Stainless Steel 316L and electropolished to achieve a maximum surface roughness of Ra ≤ 0.18 μm in accordance with SEMI F19, minimizing particle generation while providing outstanding cleanliness and corrosion resistance.

The process connection surface is finished to Ra ≤ 0.13 μm. Manufactured in an ISO 14644 Class 5 clean room, the EDA.375 features Zero & Span adjustment together with various electrical outputs and process connections, making it ideal for semiconductor, electronics, medical, biotechnology, and pharmaceutical applications.

■ Key Advantage: EP (Electropolishing)

▶ Wetted Surface: Max. Ra ≤ 0.18 μm (SEMI F19)

▶ Process Connection Surface: Ra ≤ 0.13 μm

▶ Optimized for Ultra High Purity (UHP) Gas Systems

■ Applications

▶ Semiconductor Manufacturing Equipment

▶ Ultra High Purity Gas Distribution Systems

▶ Electronics Industry

▶ Medical Industry

▶ Biotechnology

▶ Pharmaceutical Industry

■ Accuracy Class

▶ ±0.5% F.S

▶ ±0.25% F.S (Option)

▶ ±0.1% F.S (Option)

■ General Technical Specifications

Pressure ranges	0...1 bar to 0...350 bar
Accuracy	±0.5% F.S (Option : ±0.25%, ±0.1%)
Electrical connection	DIN 43650A mPm plug M12 plug 2m cable (Option)
Signal output	4...20 mA, 2-wire 0...10 V, 3-wire 0...5 V, 3-wire 1...5 V, 3-wire 0.5...4.5 V, 3-wire
Operating temperature	-20...+100 ℃ (Standard) -40...+125 ℃ (Option)